Topcoat

Topcoat

Applications

 

Daxin provides topcoat materials for immersion lithography, which can prevent photoresist from composition change due to substances dissolving into liquid (ex:water). In addition, topcoat materials can used for refractive index adjustment. A variety of specialty chemicals for nanolithography process are under development.

Features

 

  • Good water-repellent
  • Good dissolution in developer
  • No intermixing and dissolution with photoresist

Specifications

Product Name

DTC series

Remarks

Features

  • High dissolution rate

  • Low metal ions

 

Recommend Process
Conditions

Pre-bake

℃ ; min

80 ; 1

 

Refractive Index at 193nm

-

1.53-1.60

@THK=500Å

Customized

Extinction Coefficient at 193nm

-

<0.01

Receding Angle

degree

70-75