Applications

Daxin provides topcoat materials for immersion lithography, which can prevent photoresist fromcomposition change due to substances dissolving into liquid (ex: water). In addition, topcoat materialscan used for refractive index adjustment. A variety of specialty chemicals for nanolithography processare under development.

Features

1. Good water-repellent
2. Good dissolution in developer
3. No intermixing and dissolution with photoresist

Specifications