Product Semiconductor Materials Laser Release Layer Multi-functional Release Layer

Product

Laser Release Layer

Laser Release Layer

Multi-functional Release Layer

Applications

Temporary bonding of wafer to glass carrier has emerged as a viable method for various electronic device processing. Laser debonding enables the use of laser release layer (RL) that can withstand high temperatures above . The processed devices are finally debonded and separated from the carriers easily.

 

Features
  1. Excellent thermal resistance and stability over 300° C
  2. Easily stripped by laser
  3. Applicable under various laser wavelength (308/355/532/1064nm) with high absorption
  4. Optical alignment (Tunable IR absorption or transmittance)

 

Specifications

Product Name

LRA series

 Features

High laser absorption efficiency

IR absorption

 Laser Debond Wavelength

µm

308~1064

 Clean Method

Plasma

 Recommend Process   Conditions

 Coating Method

-

Slit or Spin

 Pre-bake

oC ; min

90 ; 10

 Post-bake

oC ; min

250 ; 30