Product
Laser Release Layer
Laser Release Layer

Multi-functional Release Layer
| Applications |
Temporary bonding of wafer to glass carrier has emerged as a viable method for various electronic device processing. Laser debonding enables the use of laser release layer (RL) that can withstand high temperatures above . The processed devices are finally debonded and separated from the carriers easily.
| Features |
- Excellent thermal resistance and stability over 300° C
- Easily stripped by laser
- Applicable under various laser wavelength (308/355/532/1064nm) with high absorption
- Optical alignment (Tunable IR absorption or transmittance)
| Specifications |
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Product Name |
LRA series |
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Features |
High laser absorption efficiency IR absorption |
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Laser Debond Wavelength |
µm |
308~1064 |
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Clean Method |
Plasma |
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Recommend Process Conditions |
Coating Method |
- |
Slit or Spin |
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Pre-bake |
oC ; min |
90 ; 10 |
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Post-bake |
oC ; min |
250 ; 30 |
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