Product

LCD Materials

LCD Materials

Cu/ Mo Etchant

Applications

Etchants vary according to the variety of electrode material being used: ITO, Al and Cu can all be utilized for the process. Specifically, the etching process in this situation is used for Cu/Mo wires. Cu has qualities of high conductivity and is currently replacing Al components in TFT array manufacturing processes; however, to overcome copper to-glass-substrate adhesion problems encountered during heating and other manufacturing processes, Molybdenum (Mo) is one option used as a transitioning layer on glass substrates for subsequent layering of copper and TFT arrays to be embedded as a part of LCD manufacture.

To remove unwanted areas of materials to create electrode pattern formations by an etching process, Daxin has developed Cu/ Mo Etchant with the aim of providing stable etching uniformity, even under ultra high copper loading. Additionally, it possesses a controllable etching rate for Cu/Mo wires in order to achieve smooth and even Cu wire structures.

Features
  1. Hydrogen Peroxide Type is Environmental Friendly
  2. Higher Level Stability for Ultra High Copper Loading (>10kppm)
  3. Good etching uniformity
  4. Good taper profile after etching.
Specifications
Test Item Unit DE-series Remarks
Max. Cu Loading ppm > 10k  
Etching Rate Å/min 4,000~6,000 35℃
pH value   3.7~4.4  
H2O2 Concentration % 6~8.5  
Taper Angle ° 30~70