Product
LCD Materials
LCD Materials
Cu/ Mo Etchant
Applications |
Etchants vary according to the variety of electrode material being used: ITO, Al and Cu can all be utilized for the process. Specifically, the etching process in this situation is used for Cu/Mo wires. Cu has qualities of high conductivity and is currently replacing Al components in TFT array manufacturing processes; however, to overcome copper to-glass-substrate adhesion problems encountered during heating and other manufacturing processes, Molybdenum (Mo) is one option used as a transitioning layer on glass substrates for subsequent layering of copper and TFT arrays to be embedded as a part of LCD manufacture.
To remove unwanted areas of materials to create electrode pattern formations by an etching process, Daxin has developed Cu/ Mo Etchant with the aim of providing stable etching uniformity, even under ultra high copper loading. Additionally, it possesses a controllable etching rate for Cu/Mo wires in order to achieve smooth and even Cu wire structures.
Features |
- Hydrogen Peroxide Type is Environmental Friendly
- Higher Level Stability for Ultra High Copper Loading (>10kppm)
- Excellent Etching Uniformity
- Higher Precision and Controlled Taper Profile after Etching
Specifications |
Test Item | Unit | DE-series | Remarks |
Max. Cu Loading | ppm | > 10k | |
Etching Rate | Å/min | 4,000~5,000 | 35℃ |
pH value | 3.7~3.9 | ||
H2O2 Concentration | % | 6.3~6.7 | |
Taper Angle | ° | 30~45 |